Custom Equipment-E-Beam


 

Product  Introduction
Widely used in volume production of semiconductor and LED, and meet the process requirements of uniform film
deposition on aluminum, titanium, chromium, molybdenum, vanadium, nickel, silver and indium and oxides such as ITO etc..

Structure
The product range consists of EB-500, EB-700, EB-900. The system includes evaporation chamber, rotating substrate frame,
light-heating system, electron gun and power, quarts oscillator film thickness monitor,vacuum pumping system, control system
and supporting frame etc.. The products appearance is cubic in shape, and can be installed isolated in ultra clean room.

 

 

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