Diffusion Furnace


Closed Tube & Soft Landing Diffusion Furnace
Product  Introduction:
Close-tube phosphorus diffusion、Boron diffusion, with exhaust gas, expelled from pipe collector and cooler. And various process
gases inject into tube separately and spraying. The chose-tube diffusion process is completely free from outside interference with full protection on process quality;

  • Automatic temperature and process control, and all elements are imported.
  • Wafer loading with characteristics: all digital control, more reliable, credibility, steady, non-crawling, along phenomenon, high anchor
    precision, long longevity, big capacity and three-dimensional automatic adjustment function.
  • Can be used for Annealing Process after Implant.

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